| 000 | 00587nam a2200181Ia 4500 | ||
|---|---|---|---|
| 008 | 190102s9999 xx 000 0 und d | ||
| 020 | _a978-1-84996-254-4 | ||
| 100 | _aWei Gao | ||
| 245 | _aPrecision Nanometrology | ||
| 260 | _c2010 | ||
| 650 | _aMeasurement Science and Instrumentation | ||
| 650 | _aNanotechnology | ||
| 650 | _aNanotechnology and Microengineering | ||
| 650 | _a Control, Robotics, Mechatronics | ||
| 650 | _a Surface and Interface Science, Thin Films | ||
| 650 | _aEngineering | ||
| 856 | _uhttp://link.springer.com/openurl?genre=book&isbn=978-1-84996-254-4 | ||
| 999 |
_c369489 _d369489 |
||