| 000 | 00384nam a2200145Ia 4500 | ||
|---|---|---|---|
| 008 | 180926s2013 xx 000 0 und d | ||
| 020 | _a9780070487093 | ||
| 082 | _a621.381 | ||
| 100 | _aHsu,Tai Ran | ||
| 245 | _aMems & Microsystems Design and Manufacture | ||
| 260 | _c2013 | ||
| 300 | _aXii+436 | ||
| 500 | _a& ; and ; Design ; Manufacture ; Mems ; Microsystems | ||
| 906 | _a27 | ||
| 999 |
_c332654 _d332654 |
||