| 000 | 00444nam a2200145Ia 4500 | ||
|---|---|---|---|
| 008 | 171227s2014 xx 000 0 und d | ||
| 020 | _a978-0-07-048709-3 | ||
| 100 | _aHsu, Tai-Ran | ||
| 245 |
_aMems And Microsystems _bDesign and Manufacture |
||
| 260 |
_aNew Delhi _bMc Graw Hill Education (India)Private Limited _c2014 |
||
| 300 | _aXii+436 | ||
| 365 | _b795 | ||
| 520 | _aMEMS,and,Microsystems,MEMS and Microsystems | ||
| 650 | _aMEMS and Microsystems | ||
| 906 | _a26 | ||
| 999 |
_c174744 _d174744 |
||