TY  - BOOK
AU  - Wei Gao
TI  - Precision Nanometrology
SN  - 978-1-84996-254-4
PY  - 2010///
KW  - Measurement Science and Instrumentation
KW  - Nanotechnology
KW  - Nanotechnology and Microengineering
KW  -  Control, Robotics, Mechatronics
KW  -  Surface and Interface Science, Thin Films
KW  - Engineering
UR  - http://link.springer.com/openurl?genre=book&isbn=978-1-84996-254-4
ER  -