Wei Gao <br/><br/>
Precision Nanometrology 

 -  2010 
<br/><br/><label>ISBN: </label>978-1-84996-254-4 
<br/><br/><label>Subjects--Topical Terms: </label><br/>Measurement Science and Instrumentation<br/>Nanotechnology<br/>Nanotechnology and Microengineering<br/> Control, Robotics, Mechatronics<br/> Surface and Interface Science, Thin Films<br/>Engineering