Jean Laconte, Denis Flandre, Jean-Pierre Raskin <br/><br/>
Micromachined Thin-Film Sensors for SOI-CMOS Co-Integration 

 -  2006 
<br/><br/><label>ISBN: </label>978-0-387-28843-7 
<br/><br/><label>Subjects--Topical Terms: </label><br/>Circuits and Systems<br/>Classical Mechanics<br/>Industrial and Production Engineering<br/>Solid State Physics<br/> Electronics and Microelectronics, Instrumentation<br/> Engineering, general<br/>Engineering