TY  - BOOK
AU  - Nicolae Lobontiu, Ephrahim Garcia
TI  - Mechanics of Microelectromechanical Systems
SN  - 978-0-387-23037-5
PY  - 2005///
KW  - Mechanical Engineering
KW  - Engineering
UR  - http://link.springer.com/openurl?genre=book&isbn=978-0-387-23037-5
ER  -