Hsu,Tai Ran <br/><br/>
Mems & Microsystems Design and Manufacture 

 -  2013 
 - Xii+436 
<br/><br/> & ; and ; Design ; Manufacture ; Mems ; Microsystems 
<br/><br/><label>ISBN: </label>9780070487093 
<br/><br/><label>Dewey Class. No.: </label>621.381