TY  - BOOK
AU  - Hsu, Tai-Ram
TI  - Mems And Microsystems: Design and Manufacture
SN  - 978-0-07-048709-3
PY  - 2012///
CY  - New Delhi
PB  - Tata McGraw hill Education Private Limited
KW  - MEMS and Microsystems
N2  - MEMS,and,Microsystems,MEMS and Microsystems
ER  -