Hsu, Tai-Ram <br/><br/>
Mems And Microsystems  Design and Manufacture 

 - New Delhi  Tata McGraw hill Education Private Limited  2012 
 - Xii+436 
<br/><br/> MEMS,and,Microsystems,MEMS and Microsystems 
<br/><br/><label>ISBN: </label>978-0-07-048709-3 
<br/><br/><label>Subjects--Topical Terms: </label><br/>MEMS and Microsystems