MEMS Materials and Processes Handbook
Reza Ghodssi, Pinyen Lin
MEMS Materials and Processes Handbook - 2011
978-0-387-47318-5
Circuits and Systems
Electronics and Microelectronics, Instrumentation
Materials Science, general
Surfaces and Interfaces, Thin Films
Engineering
MEMS Materials and Processes Handbook - 2011
978-0-387-47318-5
Circuits and Systems
Electronics and Microelectronics, Instrumentation
Materials Science, general
Surfaces and Interfaces, Thin Films
Engineering